Plasma-materials interactions
| データ種別 | 図書 |
|---|---|
| 出版者 | Boston ; Tokyo : Academic Press |
子書誌情報を非表示
| 1 | . Plasma diagnostics ; v. 2 Surface analysis and interactions / edited by Orlando Auciello, Daniel L. Flamm Boston ; Tokyo : Academic Press , c1989 |
| 2 | Plasma etching : an introduction / edited by Dennis M. Manos, Daniel L. Flamm Boston ; Tokyo : Academic Press , c1989 |
書誌詳細を非表示
| 書誌ID | BB50005467 |
|---|---|
| NCID | BA0662742X |